Miniaturized single-crystal silicon cantilevers for scanning force microscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1895482
Reference12 articles.
1. Frequency modulation detection using high‐Qcantilevers for enhanced force microscope sensitivity
2. Quality factors in micron- and submicron-thick cantilevers
3. Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers
4. Energy dissipation in submicrometer thick single-crystal silicon cantilevers
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