Highly precise and compact ultrahigh vacuum rotary feedthrough
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Published:2012-03
Issue:3
Volume:83
Page:035106
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Author:
Aiura Y.,Kitano K.
Cited by
7 articles.
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