Author:
Spitzer M. B.,Bunker S. N.
Subject
Physics and Astronomy (miscellaneous)
Cited by
10 articles.
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1. Production of charged (singly and multiply) phosphorous beams with electron cyclotron resonance ion source;Review of Scientific Instruments;2006-03
2. Slit extraction type compact microwave ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
3. Beam extraction experiments from microwave ion sources;Review of Scientific Instruments;1986-08
4. Experiments on an electron impact ionization ion source with phosphorus;Review of Scientific Instruments;1986-05
5. An ion implanter for silicon solar cells;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-05