Trench Pd/Si metal‐oxide‐semiconductor Schottky barrier diode for a high sensitivity hydrogen gas sensor
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103800
Reference5 articles.
1. A study of Pd/Si MIS Schottky barrier diode hydrogen detector
2. Pd–thin‐SiO2–Si diode. I. Isothermal variation of H2‐induced interfacial trapping states
3. Hydrogen sensitivity of palladium–thin-oxide–silicon Schottky barriers
4. Improvement of field and time dependent breakdown of trench capacitor using O/N/O dielectric and rounding off technique
5. Electrical Properties of Tin Oxide Ultrafine Particle Films
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