1. Integrated Quantum Photonics, Department of Physics, Humboldt-Universität zu Berlin, Newtonstraße 15, 12489 Berlin, Germany
2. JCMwave GmbH, Bolivarallee 22, D-14050 Berlin, Germany
3. Zuse Institute Berlin (ZIB), Takustraße 7, D-14195 Berlin, Germany
4. Diamond Nanophotonics, Ferdinand-Braun-Institut, Gustav-Kirchhoff-Straße 4, 12489 Berlin, Germany