Nanoindentation investigation of Ti/TiN multilayers films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373450
Reference31 articles.
1. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
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4. Microstructures and Mechanical Properties of Sputtered Cu/Cr Multilayers
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