1. Department of Precision and Microsystems Engineering, Delft University of Technology 1 , Lorentzweg 1, 2628 CD Delft, The Netherlands
2. ASML Netherlands, B.V. 2 , 5504 DR Veldhoven, The Netherlands
3. Instituto de Ciencia Molecular (ICMol), Universitat de Valencia 3 , Paterna 46980, Spain
4. Kavli Institute of Nanoscience, Delft University of Technology 4 , 2628 CJ Delft, The Netherlands