A closed-loop phase-locked interferometer for wide bandwidth position sensing
Author:
Affiliation:
1. School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia
Funder
Australian Research Council (ARC)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4935469
Reference15 articles.
1. A review of nanometer resolution position sensors: Operation and performance
2. Measuring and predicting resolution in nanopositioning systems
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4. Position Control in Lithographic Equipment [Applications of Control]
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