Thermomechanical properties of amorphous silicon and nonstoichiometric silicon oxide films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339026
Reference15 articles.
1. Transport Properties of Amorphous Silicon / Silicon Oxide Heterostructures
2. Characterization of plasma‐enhanced chemically‐vapor‐deposited silicon‐rich silicon dioxide/thermal silicon dioxide dual dielectric systems
3. Silicon oxide and nitride films deposited by an r.f. glow-discharge
4. Characterization of Plasma‐Deposited Silicon Dioxide
5. Analysis of Bi-Metal Thermostats
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