Properties of diamond membranes for x‐ray lithography
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346981
Reference24 articles.
1. Low pressure chemical vapor deposition boro-hydro-nitride films and their use in x-ray masks
2. X-ray lithography: On the path to manufacturing
3. Crystallization of diamond crystals and films by microwave assisted CVD (Part II)
4. Effect of hydrogen on the intrinsic stress in ion beam sputtered amorphous silicon films
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