Photoacoustic detection of low duty cycle gratings through optically opaque layers-Reference-Cited by-同舟云学术

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Photoacoustic detection of low duty cycle gratings through optically opaque layers

Published:2020-08-03 Issue:5 Volume:117 Page:051104
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Verrina V.¹²^ORCID,Edward S.¹²^ORCID,Zhang H.¹³,Witte S.¹³,Planken P. C. M.¹²

Affiliation:

1. Advanced Research Centre for Nanolithography (ARCNL), Science Park 106, 1098 XG Amsterdam, The Netherlands

2. Van der Waals-Zeeman Institute, University of Amsterdam, Science Park 904, 1098 XH Amsterdam, The Netherlands

3. Department of Physics and Astronomy, Vrije Universiteit, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands

Funder

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

ASML

Vrije Universiteit Amsterdam

H2020 European Research Council

Universiteit van Amsterdam

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0016078

Reference24 articles.

1. Subsurface metrology using scanning white light interferometry: absolute z coordinates deep inside displays

2. Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

3. Optical wafer metrology sensors for process-robust CD and overlay control in semiconductor device manufacturing

4. Fundamentals of picosecond laser ultrasonics

5. Surface generation and detection of phonons by picosecond light pulses

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