Exploiting the properties of TiO2 thin films as a sensing layer on (MEMS)-based sensors for radiation dosimetry applications

Author:

Shamma Khaled123ORCID,Aldwayyan Abdullah3ORCID,Albrithen Hamad124ORCID,Alodhayb Abdullah123ORCID

Affiliation:

1. Research Chair for Tribology, Surface, and Interface Sciences, Department of Physics and Astronomy, College of Science, King Saud University, Riyadh 11451, Saudi Arabia

2. King Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi Arabia

3. Department of Physics and Astronomy, College of Science, King Saud University, Riyadh 11451, Saudi Arabia

4. K.A.CARE Energy Research and Innovation Center at Riyadh, Riyadh 11451, Saudi Arabia

Funder

Deanship of Scientific Research, King Saud University

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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