Influence of proximity effects in electron-beam lithography on the optical properties of planar photonic-crystal waveguides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2801023
Reference24 articles.
1. Photonic Crystals
2. Extremely Large Group-Velocity Dispersion of Line-Defect Waveguides in Photonic Crystal Slabs
3. Ultra-high-Q photonic double-heterostructure nanocavity
4. Highly efficient in-plane channel drop filter in a two-dimensional heterophotonic crystal
5. An efficient proximity-effect correction method for electron-beam patterning of photonic-crystal devices
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2. Effect of hole shapes on the reliability of deeply-etched InP-based photonic crystal devices;physica status solidi (c);2012-05-21
3. Parabolic tapered photonic crystal cavity in silicon;Applied Physics Letters;2012-01-23
4. Loss-Relevant Structural Imperfections in Substrate-Type Photonic Crystal Waveguides;Journal of Lightwave Technology;2011-11
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