A method for computing ion energy distributions for multifrequency capacitive discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2435975
Reference14 articles.
1. Ion energy distributions in rf sheaths; review, analysis and simulation
2. Anomalies of the Energy of Positive Ions Extracted from High‐Frequency Ion Sources. A Theoretical Study
3. Principles of Plasma Discharges and Materials Processing
4. Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors
5. Ion energy distribution control in single and dual frequency capacitive plasma sources
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