Effects of electrode geometry on the ion beam extraction of closed drift type anode layer linear ion source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3665961
Reference6 articles.
1. Tribological properties of diamond-like carbon coatings prepared by anode layer source and magnetron sputtering
2. Ion beam energy effects on structure and properties of diamond like carbon films deposited by closed drift ion source
3. Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source
4. An object-oriented electromagnetic PIC code
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