Optical imaging module for astigmatic detection system
Author:
Affiliation:
1. Institute of Physics, Academia Sinica, Taipei 11529, Taiwan
2. Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
3. Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
Funder
Academia Sinica
Ministry of Science and Technology, Taiwan (MOST)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4952438
Reference17 articles.
1. Monitoring of an atomic force microscope cantilever with a compact disk pickup
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