Hole mobility enhancements and alloy scattering-limited mobility in tensile strained Si/SiGe surface channel metal–oxide–semiconductor field-effect transistors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1499213
Reference25 articles.
1. Totally relaxed GexSi1−xlayers with low threading dislocation densities grown on Si substrates
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3. Electron mobility enhancement in strained-Si n-type metal-oxide-semiconductor field-effect transistors
4. High‐mobilityp‐channel metal‐oxide‐semiconductor field‐effect transistor on strained Si
5. Comparative study of phonon‐limited mobility of two‐dimensional electrons in strained and unstrained Si metal–oxide–semiconductor field‐effect transistors
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