CO2laser processing of diffusion induced lattice imperfections in silicon: Experiment and theory
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339384
Reference17 articles.
1. Control of diffusion induced dislocations in phosphorus diffused silicon
2. Silicon Phosphide Precipitates in Diffused Silicon
3. Concentration‐dependent diffusion of B and P in Si
4. Laser annealing of diffusion‐induced imperfections in silicon
5. Depth of melting produced by pulsed‐laser irradiation
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