Achieving smooth motion and high-speed for piezoelectric stick–slip actuator based on the two-stage lever principle-Reference-Cited by-同舟云学术

Achieving smooth motion and high-speed for piezoelectric stick–slip actuator based on the two-stage lever principle

Published:2021-12-01 Issue:12 Volume:92 Page:125001
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Li Honglong¹^ORCID,Wang Jiru¹^ORCID,Xu Zhi¹,Qin Feng¹,Wang Zhaoxin¹,Zhao Hongwei¹^ORCID

Affiliation:

1. School of Mechanical and Aerospace Engineering, Jilin University (Nanling Campus), 5988 Renmin Street, Changchun 130025, People’s Republic of China

Funder

Natural Science Foundation for Distinguished Young Scholars

National Key R and Dt Program of China

National Science and Technology Bureau Project

Pre-Research of Equipment of the General

National Science and Technology Innovation Leading Academic

Foundation for Innovation Research Groups of the National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0070960

Reference34 articles.

1. Design and Trajectory Tracking of a Nanometric Ultra-Fast Tool Servo

2. A flexure-based mechanism and control methodology for ultra-precision turning operation

3. Cryogenic mount for mirror and piezoelectric actuator for an optical cavity

4. A high speed X-Y nanopositioner with integrated optical motion sensing

5. Development of a low capacitance two-axis piezoelectric tilting mirror used for optical assisted micromanipulation

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