Performance improvement of amorphous silicon thin‐film transistors with SiO2gate insulator by N2plasma treatment
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111009
Reference3 articles.
1. The physics of amorphous-silicon thin-film transistors
2. Process Techniques of 15-inch Full-Color High-Resolution Liquid Crystal Displays Addressed by a-Si Thin Film Transistors
3. Defect pool in amorphous-silicon thin-film transistors
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