Integrated nanofabrication with the scanning electron microscope and scanning tunneling microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110499
Reference14 articles.
1. Materials and processes for microstructure fabrication
2. Surface Studies by Scanning Tunneling Microscopy
3. 250‐Å linewidths with PMMA electron resist
4. 10‐nm linewidth electron beam lithography on GaAs
5. The scanning tunneling microscope as a tool for nanofabrication
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