Structure and properties of diamondlike carbon coatings deposited in rf plasma from benzene and monosubstituted benzenes
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342021
Reference19 articles.
1. Hexagonal Diamond—A New Form of Carbon
2. Reactive pulse plasma crystallization of diamond and diamond-like carbon
3. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
4. Diamondlike amorphous carbon films prepared by magnetron sputtering of graphite
5. The deposition of hard surface layers by hydrocarbon cracking in a glow discharge
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