Field‐emission liquid‐metal ion source and triode ion gun
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329062
Reference7 articles.
1. Abstract: Intense field‐emission ion source of liquid metals
2. Miniature ion sources for analytical instruments
3. Ion source of high brightness using liquid metal
4. Liquid gold ion source
5. A high‐intensity scanning ion probe with submicrometer spot size
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1. Mass distributions and geometrical configurations of gold clusters (Au)n+ obtained in a hydrodynamic ion source;International Journal of Mass Spectrometry and Ion Processes;1989-10
2. Effects of backsputtered material on gallium liquid metal ion source behavior;Journal of Applied Physics;1988-05-15
3. Ion-Beam Lithography;Lithography for VLSI;1987
4. Focused ion beam milling;Vacuum;1986-11
5. Application of focused ion beam technology to maskless ion implantation in a molecular beam epitaxy grown GaAs or AlGaAs epitaxial layer for three‐dimensional pattern doping crystal growth;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1986-05
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