Subject
General Physics and Astronomy
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. References;Thin Films by Chemical Vapour Deposition;1990
2. Characterization of Silicon Expitaxial Films;Materials and Process Characterization;1983
3. Autodoping Effects in Silicon Epitaxy;Journal of The Electrochemical Society;1980-06-01
4. Literatur;Ionenimplantation;1978
5. Atomic diffusion in semiconductor epitaxial structures;Physica Status Solidi (a);1977-07-16