1. Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology 1 , Beijing 100081, China
2. Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology 2 , Beijing 100081, China
3. BIT Chongqing Institute of Microelectronics and Microsystem 3 , Chongqing 400000, China