Spectroscopic determination of the structure of amorphous nitrogenated carbon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367211
Reference37 articles.
1. Nitrogen modification of hydrogenated amorphous carbon films
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3. Properties of carbon nitride films with composition ratioC/N=0.5–3.0 prepared by the ion and vapor deposition method
4. Deposition and characterization of amorphous carbon nitride thin films
5. Deposition by reactive ion-plasma sputtering and characterization of CN thin films
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