1. Max Planck Institute for Plasma Physics (IPP) 1 , Boltzmannstr. 2, 85748 Garching, Germany
2. Fusion for Energy (F4E), C/ Josep Pla 2 2 , Torres Diagonal Litoral B3, 08019 Barcelona, Spain
3. Fraunhofer Institute for Microengineering and Microsystems (IMM) 3 , Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany
4. Swiss Center for Electronics and Microtechnology (CSEM) 4 , Rue Jaquet-Droz 1, 2002 Neuchâtel, Switzerland