1. Terahertz Technology Innovation Research Institute and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, No. 516 JunGong Road, Shanghai 200093, China
2. Terahertz Science Cooperative Innovation Center, Chengdu 610054, China
3. Institute on Laser and Information Technologies of RAS, Branch of the FSRC “Crystallography and Photonics,” RAS, Shatura, Moscow Region 140700, Russia