High-selectivity terahertz metamaterial nitric oxide sensor based on ZnTiO3 perovskite membrane

Author:

Wu Pei-Jung1ORCID,Hung Jing-Ting2,Hsieh Cho-Fan3ORCID,Yang Chii-Rong2,Yang Chan-Shan145ORCID

Affiliation:

1. Institute and Undergraduate Program of Electro-Optical Engineering, National Taiwan Normal University 1 , Wenshan Dist., 116 Taipei City, Taiwan

2. Department of Mechatronic Engineering, National Taiwan Normal University 2 , Daan Dist., 106 Taipei City, Taiwan

3. Green Energy Testing & Certification Division, Center for Measurement Standards, Industrial Technology Research Institute 3 , 310401 Hsinchu County, Taiwan

4. Micro/Nano Device Inspection and Research Center, National Taiwan Normal University 4 , Taipei 106, Taiwan

5. Applied High Entropy Technology (AHET) Center, National Cheng Kung University 5 , Tainan 70101, Taiwan

Abstract

Human exhaled gases contain a wide range of volatile organic compounds, offering the potential for detecting physiological, cardiovascular, and endocrine disorders. For instance, nitric oxide (NO) concentration can be indicative of chronic obstructive pulmonary disease. Analyzing exhaled gases provides a noninvasive approach to disease detection without posing any risks to individuals. While electronic sensors have been developed over the past two decades for NO detection at high temperatures, few studies have explored optical detection in the ultraviolet to visible light range, which may have adverse effects on the skin. In this study, we designed a split-ring resonator metamaterial tailored for operation within the terahertz (THz) frequency range. Specifically, the metamaterial was designed to resonate at the NO frequency of 0.257 THz. To enhance gas absorption capacity, we incorporated a composite film layer consisting of ZnTiO3 and reduced graphene oxide onto the metamaterial. By sintering ZnTiO3 powder at different temperatures, we achieved an increase in component sensitivity (ΔT/T) from 2% to 16.4%. Overall, the proposed metamaterial holds promise for both physical monitoring applications and the development of wearable electronic devices.

Funder

National Science and Technology Council

Publisher

AIP Publishing

Subject

Computer Networks and Communications,Atomic and Molecular Physics, and Optics

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