Morphology and transport of YBa2Cu3O7−xsputtered in argon, oxygen, and hydrogen: Dependence on deposition temperature
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.355077
Reference29 articles.
1. Double gun off-axis sputtering of large area YBa/sub 2/Cu/sub 3/O/sub 7- delta / superconducting films for microwave applications
2. Critical parameters in the single‐target sputtering of YBa2Cu3O7
3. Synthesis and properties of YBa2Cu3O7 thin films grown in situ by 90° off-axis single magnetron sputtering
4. Role of hydrogen in the growth of Y1Ba2Cu3O7on MgO substrates by off‐axis magnetron sputtering
5. The effects of added gases in the sputter deposition of YBa/sub 2/Cu/sub 3/O/sub 7/ thin films
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