Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance-Reference-Cited by-同舟云学术

Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Published:2016-03-24 Issue:12 Volume:119 Page:125307
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:J. Appl. Phys.

Author:

Burcklen C.¹,Soufli R.¹²,Dennetiere D.³,Polack F.³,Capitanio B.³^ORCID,Gullikson E.⁴,Meltchakov E.¹,Thomasset M.³^ORCID,Jérome A.¹,de Rossi S.¹,Delmotte F.¹

Affiliation:

1. Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS, Université Paris-Saclay, 91127 Palaiseau Cedex, France

2. Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA

3. Synchrotron SOLEIL, L'Orme des Merisiers, Saint Aubin, BP 48F-91192 Gif sur Yvette Cedex, France

4. Center for X-ray Optics, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, California 94720, USA

Funder

U.S. Department of Energy (DOE)

Agence Nationale de la Recherche (ANR)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.4944723

Reference33 articles.

1. High-efficiency B_4C/Mo_2C alternate multilayer grating for monochromators in the photon energy range from 07 to 34 keV

2. X-ray study of state-of-the-art small d-spacing W/B4C multilayers

3. Normal-incidence reflectance of optimized W/B_4C x-ray multilayers in the range 14 nm < λ < 24 nm

4. High performance La/B4C multilayer mirrors with barrier layers for the next generation lithography

5. Multilayer mirror for x rays below 190 eV

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