Crystallographic orientation of silicon on an amorphous substrate using an artificial surface‐relief grating and laser crystallization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90936
Reference10 articles.
1. Oriented crystal growth on amorphous substrates using artificial surface‐relief gratings
2. Alignment of liquid crystals using submicrometer periodicity gratings
3. Surface relief gratings of 3200‐Å‐period fabrication techniques and influence on thin‐film growth
4. Surface relief structures with linewidths below 2000 Å
5. Fabrication of deep square wave structures with micron dimensions by reactive sputter etching
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