Hot-wire plasma assisted chemical vapor deposition: A deposition technique to obtain silicon thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1427133
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1. Amorphous silicon solar cell
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4. Chemically Sensitive Light Addressable Potentiometric Sensors Based on Hydrogenated Amorphous Silicon
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1. Properties of a-Si:H intrinsic films produced by HWPA-CVD technique;Thin Solid Films;2004-03
2. Gas Phase Reactions between SiH4 and B2H6: A Theoretical Study;The Journal of Physical Chemistry A;2003-02-13
3. Photovoltaics literature survey (No. 14);Progress in Photovoltaics: Research and Applications;2002
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