Breakdown of the high-voltage sheath in metal plasma immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125645
Reference9 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. High voltage sheath behavior in a drifting plasma
3. Novel metal ion surface modification technique
4. Metal plasma immersion ion implantation and deposition: a review
5. Theory of the expanding plasma of vacuum arcs
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3. Particle-in-Cell Investigation on Temporal Evolution of High-Voltage Sheath of Mixed Deuterium-Titanium Plasmas;IEEE Transactions on Plasma Science;2023-10
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