Study of flashlamp annealing to promote crystallization of indium tin oxide thin films

Author:

Neitzke Ethan1ORCID,Fan Qi Hua12ORCID

Affiliation:

1. Department of Electrical and Computer Engineering, Michigan State University 1 , East Lansing, Michigan 48824, USA

2. Department of Chemical Engineering and Materials Science, Michigan State University 2 , East Lansing, Michigan 48824, USA

Abstract

The use of flashlamp annealing as a low-temperature alternative or supplement to thermal annealing is investigated. Flashlamp annealing and thermal annealing were conducted on 100 nm thick indium tin oxide (ITO) films deposited on glass to compare the properties of films under different annealing methods. The ITO samples had an average initial sheet resistance of 50 Ω/sq. After flashlamp annealing, the sheet resistance was reduced to 33 Ω/sq only, while by thermal annealing at 210 °C for 30 min, a sheet resistance of 29 Ω/sq was achieved. Using a combination of flashlamp annealing and thermal annealing at 155 °C for 5 min, a sheet resistance of 29 Ω/sq was achieved. X-ray diffraction analysis confirmed that flashlamp annealing can be used to crystallize ITO. Flashlamp annealing allows for low-temperature crystallization of ITO on a time scale of 1–3 min. Through electrical and optical characterizations, it was determined that flashlamp annealing can achieve similar electrical and optical properties as thermal annealing. Flashlamp offers the method of low-temperature annealing, which is particularly suitable for temperature sensitive substrates.

Funder

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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