Manipulation of K center charge states in silicon nitride films to achieve excellent surface passivation for silicon solar cells
Author:
Funder
NSF
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4863829
Reference23 articles.
1. Record low surface recombination velocities on 1 Ω cm p‐silicon using remote plasma silicon nitride passivation
2. Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics
3. High-quality surface passivation of silicon solar cells in an industrial-type inline plasma silicon nitride deposition system
4. Bulk and surface passivation of silicon solar cells accomplished by silicon nitride deposited on industrial scale by microwave PECVD
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