1. Department Back-End of Line, Fraunhofer Institute for Electronic Nano Systems, 09126 Chemnitz, Germany
2. Institute for Solid State Physics, University of Jena, 07743 Jena, Germany
3. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf e.V., 01328 Dresden, Germany
4. Leibniz Institute of Photonic Technology e.V., IPHT, 07745 Jena, Germany
5. Institute of Experimental Physics, TU Bergakademie Freiberg, 09596 Freiberg, Germany
6. Center for Microtechnologies, Technical University of Chemnitz, 09126 Chemnitz, Germany