Effects of dielectric charging on fundamental forces and reliability in capacitive microelectromechanical systems radio frequency switch contacts
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2194125
Reference30 articles.
1. Performance of low-loss RF MEMS capacitive switches
2. Micromachined low-loss microwave switches
3. Distributed MEMS true-time delay phase shifters and wide-band switches
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