Enhancing the thermal responsivity of microelectromechanical system beam resonators by preloading a critical buckling strain-Reference-Cited by-同舟云学术

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Enhancing the thermal responsivity of microelectromechanical system beam resonators by preloading a critical buckling strain

Published:2021-10-11 Issue:15 Volume:119 Page:153502
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Qiu Boqi¹^ORCID,Zhang Ya²^ORCID,Nagai Naomi¹,Hirakawa Kazuhiko¹³^ORCID

Affiliation:

1. Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

2. Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, 184-8588, Japan

3. Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

Funder

Adaptable and Seamless Technology Transfer Program through Target-Driven R and D

Japan Society for the Promotion of Science

Mitsubishi Foundation

Precise Measurement Technology Promotion Foundation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0065800

Reference32 articles.

1. Microbolometers for infrared detection

2. Bolometers for infrared and millimeter waves

3. Graphene-based mid-infrared room-temperature pyroelectric bolometers with ultrahigh temperature coefficient of resistance

4. Pyroelectric detectors and their applications

5. The Detection and Measurement of Infrared Radiation

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1. Dynamic Behaviors of Delaminated Nanofilms Partly Bonded on Substrates With Sub-Nanoscale van der Waals Dynamic Boundaries;Journal of Applied Mechanics;2024-01-29

2. Analytical displacement-controlled solutions to bifurcation buckling and post-buckling of soft functional beams with constrained ends;2023-07-28

3. Terahertz Detectors Using Microelectromechanical System Resonators;Sensors;2023-06-26

4. Mechanical Control of Nonlinearity in Doubly Clamped MEMS Beam Resonators Using Preloaded Lattice-Mismatch Strain;Physical Review Applied;2023-02-09

5. SOI-based micro-mechanical terahertz detector operating at room-temperature and atmospheric pressure;Applied Physics Letters;2022-06-27

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