Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2842427
Reference15 articles.
1. Maskless etching of silicon using patterned microdischarges
2. Microdischarge in microbridge plasma display with holes in the cathode
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4. Microhollow cathode discharge excimer lamps
5. Hollow cathode sustained plasma microjets: Characterization and application to diamond deposition
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