Electron holographic characterization of electrostatic potential distributions in a transistor sample fabricated by focused ion beam
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1432746
Reference4 articles.
1. Electron Holographic Observations of the Electrostatic Field Associated with Thin Reverse-Biasedp−nJunctions
2. Direct observation of potential distribution across Si/Sip‐njunctions using off‐axis electron holography
3. Two-Dimensional Mapping of the Electrostatic Potential in Transistors by Electron Holography
4. Absolute measurement of normalized thickness, t/λi, from off-axis electron holography
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