Measurement of the spatial characteristics of an erosive silicon laser plasma using small-sized high-resolution spectrometers

Abstract

The spatial characteristics of the erosion laser plasma are investigated. The application of small-sized spectrometers of the visible and ultraviolet ranges for recording the spectrum of plasma radiation is considered. Erosive laser plasma is formed on the surface of a silicon target under the action of pulsed laser radiation with a wavelength of 1064 nm under normal atmospheric conditions. The laser plasma torch was scanned using a movable slit diaphragm oriented parallel to the target surface. The emission of erosion laser plasma was recorded using small-size spectrometers. Based on the obtained plasma emission spectra, the dependences of the intensity of the spectral lines of silicon on the geometric position of the slit diaphragm are revealed. A comparison is made of the intensities of the spectral lines of silicon on the polished and grinded sides of the target.