The measurement and uncertainty of a calibration standard for the scanning electron microscope-Reference-Cited by-同舟云学术

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The measurement and uncertainty of a calibration standard for the scanning electron microscope

Published:1994-03 Issue:2 Volume:99 Page:191
ISSN:1044-677X
Container-title:Journal of Research of the National Institute of Standards and Technology
language:en
Short-container-title:J. RES. NATL. INST. STAN.

Author:

Fu J.,Croarkin M.C.,Vorburger T.V.

Publisher

National Institute of Standards and Technology (NIST)

Subject

General Engineering

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evaluating Stage Motion for Automated Electron Microscopy;Microscopy and Microanalysis;2023-10-13

2. A Traceable Metrological Method with Nanometer Scale Resolution for Micro-Structure;Key Engineering Materials;2015-05

3. Micron and Nanometer Measuring Methods Based on Metrological Scanning Electron Microscope;Key Engineering Materials;2014-04

4. Novel CD-SEM magnification calibration reference of sub-50-nm pitch multi-layer grating with positional identification mark;SPIE Proceedings;2011-03-17

5. Critical dimension–scanning electron microscope magnification calibration with 25-nm pitch grating reference;Journal of Micro/Nanolithography, MEMS, and MOEMS;2011-01-01

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