Hyperthermal Atomic Oxygen Beam Irradiation Effect on the Hydrogenated Si-doped DLC Film-Reference-Cited by-同舟云学术

Hyperthermal Atomic Oxygen Beam Irradiation Effect on the Hydrogenated Si-doped DLC Film

Published:2015 Issue:4 Volume:40 Page:363-368
ISSN:1382-3469
Container-title:Transactions of the Materials Research Society of Japan
language:en
Short-container-title:Trans. Mat. Res. Soc. Japan

Author:

Kidena Kengo¹,Endo Minami¹,Takamatsu Hiroki¹,Imai Ryo¹,Niibe Masahito¹,Yokota Kumiko²,Tagawa Masahito²,Furuyama Yuichi³,Komatsu Keiji⁴,Saitoh Hidetoshi⁴,Kanda Kazuhiro¹

Affiliation:

1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo

2. Faculty of Engineering, Kobe University

3. Faculty of Maritime Sciences, Kobe University

4. Department of Materials Science and Technology, Nagaoka University of Technology

Publisher

The Materials Research Society of Japan

Link

https://www.jstage.jst.go.jp/article/tmrsj/40/4/40_363/_pdf

Reference34 articles.

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