Effects of Substrate Temperature on Adsorption of Hydrocarbon Species Generated in Methane Plasma

Author:

Shinohara Masanori,Cho Ken,Matsuda Yoshinobu,Fujiyama Hiroshi,Okamoto Keishi,Nakatani Tatsuyuki

Publisher

The Materials Research Society of Japan

Reference9 articles.

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3. [3] M. Shinohara, T. Katagiri, K. Iwatsuji, H. Shibata, Y. Matsuda, and H. Fujiyarna, Thin Solid Films 506-507, 710-714 (2006).

4. [4] M. Shinohara, K. Iwatsuji, T. Katagiri, H. Shibata, Y. Matsuda and H. Fujiyarna, Appl. Sur. Sci. 252, 8589-8592 (2006).

5. [5] Y.J. Chabal, Surf. Sci. Rep. 8, 211-357 (1988).

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