Synthesis of Chromium Oxycarbide Thin Films by Reactive DC Sputtering with Carbon Dioxide Gas-Reference-Cited by-同舟云学术

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Synthesis of Chromium Oxycarbide Thin Films by Reactive DC Sputtering with Carbon Dioxide Gas

Published:2013 Issue:3 Volume:38 Page:377-379
ISSN:1382-3469
Container-title:Transactions of the Materials Research Society of Japan
language:en
Short-container-title:Trans. Mat. Res. Soc. Japan

Author:

Sonoda Tsutomu¹,Nakao Setsuo¹,Ikeyama Masami¹,Fujima Takuya²,Ishizaki Takahiro³

Affiliation:

1. National Institute of Advanced Industrial Science and Technology (AIST)

2. Department of Mechanical Engineering, Faculty of Engineering, Tokyo City University

3. Department of Materials Science and Engineering, Faculty of Engineering, Shibaura Institute of Technology

Publisher

The Materials Research Society of Japan

Link

https://www.jstage.jst.go.jp/article/tmrsj/38/3/38_377/_pdf

Reference4 articles.

1. [1] T. Kado and Y. Noda: J. Electrochem. Soc. 136 [8], 2184 (1989).

2. [2] T. Kado and Y. Noda: Jpn. J. Appl. Phys. 28[8], 1450 (1989).

3. [3] T. Kado et al.: Journal of Vacuum Society of Japan 7, 463 (2004).

4. [4] T. Kado and Q. Fan: J. Am. Ceram. 84 [8], 1763 (2001).

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