Process control of organosilicon plasmas for barrier film preparations-Reference-Cited by-同舟云学术

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Process control of organosilicon plasmas for barrier film preparations

Published:1998-06-30 Issue:6 Volume:70 Page:1203-1208
ISSN:1365-3075
Container-title:Pure and Applied Chemistry
language:
Short-container-title:

Author:

Lamendola R.,d’Agostino R.

Publisher

Walter de Gruyter GmbH

Subject

General Chemical Engineering,General Chemistry

Link

https://www.degruyter.com/document/doi/10.1351/pac199870061203/pdf

Cited by 42 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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