Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration
Author:
Funder
NASA Space Technology Research Fellowship
Publisher
American Astronomical Society
Subject
Space and Planetary Science,Astronomy and Astrophysics
Link
https://iopscience.iop.org/article/10.3847/1538-4357/ab76d3/pdf
Reference35 articles.
1. X-ray optics 2: A technique for high resolution spectroscopy
2. Fabrication of sawtooth diffraction gratings using nanoimprint lithography
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