Estimate Pulsed Laser Drilling Aluminum Nitride (AlN) Ceramic: A Thermal Simulation and Experimental Analyze
-
Published:2022-10
Issue:2
Volume:17
Page:
-
ISSN:1880-0688
-
Container-title:Journal of Laser Micro/Nanoengineering
-
language:
-
Short-container-title:JLMN
Publisher
Japan Laser Processing Society
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Instrumentation