Femtosecond Laser Slicing of Single Crystal AlN Layer Grown by Hydride Vapor Phase Epitaxy on an AlN Substrate Generated by Physical Vapor Transport
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Published:2024-02
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Volume:
Page:
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ISSN:1880-0688
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Container-title:Journal of Laser Micro/Nanoengineering
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language:
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Short-container-title:JLMN
Publisher
Japan Laser Processing Society